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精密微加工

3C 与半导体
激光应用

面向消费电子与半导体制造的先进超快激光工艺——SiC 晶圆切割、脆性材料切割、激光开槽、微纳结构与镀层去除。

~1μm贝塞尔光丝直径
ps/fs皮秒/飞秒激光源
SiC · AlNspan>硬脆材料
μm-levelspan>微米级开槽与结构
加工实况

激光微加工高速摄影

1/1000 秒高速摄影——激光微加工进行时
核心技术

技术能力

皮秒/飞秒超快激光工艺,专攻 3C 与半导体制造中最棘手的难题。

01

SiC Wafer Stealth Dicing

Laser stealth cutting of silicon carbide wafers for semiconductor production — internal modification followed by clean tape-expansion separation.

02

Bessel Cutting of Brittle Materials

Kerr-effect self-focusing forms a ~1μm filament through glass and transparent materials — burst-mode cutting with pristine cross-sections.

03

Laser Direct Writing

Innovative laser direct-writing photoresist technology replaces photolithography masks — fast, flexible PCB sample preparation.

04

AlN & Ceramic Cutting

Cutting aluminium nitride and ceramic substrates of different thicknesses, plus SiC rod cutting and wafer hard punching.

05

Laser Slotting

Galvanometer scanner with F-Theta optics delivers precise micro-slots — profile-verified to μm-level depth accuracy.

06

Micro-Nano Structuring

Surface texturing of stainless steel, zirconium, titanium and aluminium for functional and cosmetic finishes.

07

Coating Laser Removal

Selective PVD coating removal and ceramic surface laser heat-treatment discoloration — no masks, no chemicals.

08

Beam Shaping (DOE)

Diffractive optical elements transform Gaussian spots into flat-top beams for uniform energy distribution across the work area.

09

Surface Cleaning

Laser cleaning of silicon carbide material surfaces — contamination removal without contact or abrasives.

加工成果

工艺图库

3C electronics laser application production line — three enclosed stations
3C electronics laser application line
Wafer stealth dicing process — laser internal modification and tape expansion separation
Stealth dicing: internal laser modification → clean chip separation
Silicon carbide SiC wafers in carrier
Silicon carbide (SiC) wafers
Laser slotting patterns on circular substrates
Laser slotting patterns — μm-level precision
Laser marking samples on colored ceramic plates
Fine laser marking on ceramic — multiple colours
服务行业

技术应用领域

消费电子

Precision marking, welding and cutting — earphone solder ball soldering, VR 3D surface marking, wearable glass cutting, back-cover deep engraving, groove marks and accessory marking.

新能源汽车

Batteries, motors and automotive electronics — metal and dissimilar-metal welding, high-power welding, busbar and cell-tab joining.

半导体

Wafer marking and dicing, IC marking, plasma cleaning and AOI inspection support — including PCB/FPCB precision cutting.

包装追溯

Barcodes, data matrix and 3D marking for food, medical and tobacco packaging — permanent, high-speed traceability coding.

洽谈您的应用

晶圆切割、玻璃切割、开槽或微结构——告诉我们材料与规格,我们安排工艺试样。

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